{"admin":{"added":1592954514000,"created":1031184000000,"id":"term-113317","indexed":1747246233150,"modified":1037362452000,"processed":1747245848792,"source":"adlib","stream":"fitz-online","uid":"adlib-term-113317","uuid":"97632444-9f32-32c0-81d1-53ea7f2ec9a2","version":2},"name":[{"primary":true,"value":"photolithographic"}],"parent":[{"@link":{"type":"reference"},"admin":{"id":"term-25923","uid":"adlib-term-25923","uuid":"d57e3a5b-56dd-378d-b3d8-45f1a7d9e4ef"},"summary_title":"printed"}],"related":[{"@link":{"type":"reference"},"admin":{"id":"term-29851","uid":"adlib-term-29851","uuid":"91671672-00e9-3fc0-93e1-434d6f773eb7"},"summary_title":"photolithography"}],"summary_title":"photolithographic","type":{"base":"term"}}