{"admin":{"added":1592953024000,"created":1312632483000,"id":"term-28403","indexed":1616541034891,"modified":1312632518000,"processed":1616290199556,"source":"adlib","stream":"fitz-online","uid":"adlib-term-28403","uuid":"1f6fae2d-4a55-36a0-8190-2453c6df48af","version":2},"name":[{"primary":true,"value":"photo-lithography"}],"summary_title":"photo-lithography","type":{"base":"term"},"use":[{"@link":{"type":"reference"},"admin":{"id":"term-29851","uid":"adlib-term-29851","uuid":"91671672-00e9-3fc0-93e1-434d6f773eb7"},"summary_title":"photolithography"}]}