{"admin":{"added":1592953048000,"created":1312632483000,"id":"term-29742","indexed":1616541412737,"modified":1312632520000,"processed":1616290316313,"source":"adlib","stream":"fitz-online","uid":"adlib-term-29742","uuid":"adf483e8-e9bf-3f7d-a1c9-7f2f6f91a449","version":2},"name":[{"primary":true,"value":"photolithographic process"}],"summary_title":"photolithographic process","type":{"base":"term"},"use":[{"@link":{"type":"reference"},"admin":{"id":"term-29851","uid":"adlib-term-29851","uuid":"91671672-00e9-3fc0-93e1-434d6f773eb7"},"summary_title":"photolithography"}]}